VAT 612 Series - Page 97

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Series 612 MAINTENANCE

605262EE Edition 2018-08-20 97/

116

Description

Required tool

21.

Reinstall valve into vacuum system according to

chapter «Installation».

Main Page

Table of Contents3
Description of Product6
Identification of Product6
Use of Product6
Used Abbreviations6
Related Documents6
Important Information6
Technical Data7
Control and Actuating Unit7
Valve Unit9
Safety10
Compulsory Reading Material10
Danger Levels10
Personnel Qualifications11
Safety Labels11
Design and Function12
Design12
Function12
Pressure Control System Overview and Function13
Principle of a Pressure Control System14
Installation15
Unpacking15
Installation into the System16
Installation Space Condition17
Connection Overview17
Installation Procedure18
Tightening Torque19
Mounting with Centering Rings19
Mounting with O-Ring in Grooves20
Admissible Forces20
Admissible Forces at Controller22
Requirements to Sensor Connection23
Electrical Connection23
Ground Connection24
Sensor Supply Concepts25
Power and Sensor Connection (+24 VDC Sensors)26
Power and Sensor Connection (±15 VDC Sensors) Without Opt. SPS Module28
Power and Sensor Connection (±15 VDC Sensors) with Optional SPS Module30
Ethercat Interface Connection31
Logic I/O32
Service Port Connection33
Initial Operation34
Device Identification Value35
Ethercat Configuration35
LOGIC I/O Configuration44
Valve Configuration45
Sensor Configuration46
Zero47
LEARN (Adaptive)48
Pressure Control Configuration50
Tuning of Control Performance51
Tuning of Control Performance with Adaptive Pressure Controller52
Tuning of Control Performance with Fixed PI Pressure Controller57
Tuning of Control Performance with Soft Pump Pressure Controller60
Ethercat Interface (General)63
Ethercat Interface (Process Data - Cyclic Communication)63
OUTPUT Buffer (Master PLC)63
INPUT Buffer (Master PLC)66
Ethercat Interface (Parameter Data - Acyclic Communication)71
Ethercat Object Dictionary71
Communication and Timing between Master (PLC) and Slave (VAT-Valve)77
Operation78
Normal Operation78
Local Operation78
Remote Operation79
Close Valve80
Open Valve80
Position Control80
Pressure Control81
Pressure Control Operation with 2 Sensors82
Display Information83
Power up83
Operation84
Fatal Error84
Ethercat Leds84
Safety Mode86
Service Indication86
Operation During Power up86
Behavior in Case of Power Failure86
Operation under Increased Temperature87
Trouble Shooting88
Additional Ethercat Warning91
Maintenance92
Maintenance Intervals92
Maintenance Procedures93
Replacement of Shaft Feedthrough Seals and Valve Cleaning94
Replacement of Option Board98
Retrofit / Replacement Procedure100
Repairs104
Dismounting and Storage105
Dismounting105
Storage106
Packaging and Transport107
Packaging107
Transport108
Disposal109
Spare Parts110
Drawing111
Sample Picture111
ISO-KF Valve Unit - Aluminum Blank, Without Heating112
ISO-KF Valve Unit - Stainless Steel, Without Heating112
Seals and Grease113

VAT 612 Series - Page 97

Table of Contents

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