VAT 613 Series - Design and Function; Design; Function

DESIGN AND FUNCTION Series
613
10/149 Edition 12.08.2022 984360EC
3 Design and Function
4 Design and Function
4.1 Design
1 Integrated controller 4 Double seal
2 Coupling 5 Plate
3 Bearing 6 Valve body
4.2 Function
The valve plate (5) acts as a throttling element and varies the conductance of the valve opening.
The integrated controller (1) calculates the required plate position to achieve the setpoint pressure.
See also principle drawing on chapter: «Connection Overview».
Actuation is handled by a stepper motor with an encoder monitoring the position. This principle
ensures very fast and accurate process pressure control even in demanding contaminating processes.
Rotary feedthrough
with double seal
1
2
4
5
6
3