VAT 613 Series - Connection overview

Series 613 INSTALLATION
984360EC Edition 12.08.2022 21/
149
5.4 Connection overview
Controller IC2-H3:
System:
1 Valve
2 Process chamber
3 Gas inlet
4 Pressure sensor(s)
5 Sensor cable(s)
6 Controller and actuator
7 Cable to remote control unit
8 Cable to power supply
9 Pump
M
3
4
5
7
8
2
1
9
6
Ground (FE)
connection