INSTALLATION Series
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Edition 12.08.2022 984360EC
Location: CPA/Navigation/Parameters: Pressure Sensor.Sensor 1, Pressure Sensor.Sensor 2
Set to ‘True’ if a sensor is connected
Set to ‘True’ if the sensor signal is used for pressure
‘
‘Digital’
‘Simulation’
Sensor has an analog voltage interface
and is direct connected to the valve.
Sensor has an EtherCAT interface and is
connected to the EtherCAT bus
Testing the valve and pressure control
without being connected to the system
Select type of the sensor signal
‘Linear’
‘Logarithmic’
Most gauges are linear type gauges.
Set the pressure data unit of the gauge:
Pa, kPa, bar, mbar, Torr, mTorr, psia, psig
Range.Upper Limit Data Value
Range.Lower Limit Data Value
Set the upper limit and lower limit of the gauge in the unit
of “Range.Data Unit”
Example for a 250mTorr linear sensor:
Upper Limit = 250.0
Lower Limit = 0.0
Range.Upper Limit Voltage Value
Range.Lower Limit Voltage Value
These parameters are only used for gauges with analog
voltage interface.
The values corresponds to Range.Upper Limit Data Value
and Range Lower Limit Data Value
Example:
Upper Limit: 10.0V 250mTorr Range Upper Limit Data
Value
Lower Limit: 0.0V 0.0mTorr Range Lower Limit Data
Value
‘True’ enables the filter
Set the filter type, which should be applied to the related
Sensor Input:
Low-pass, Low-
pass Simple, Median, Moving Average,
Line Frequency Suppression, FIR custom
Set filter time in the range of 0.0 to 1.0 second.
Note: Filter delays the sensor signals which is detrimental
The actual Pressure value of the regarding Sensor