VAT 613 Series - Page 92

OPERATION Series
613
92/149 Edition 12.08.2022 984360EC
6.3.2.2 Choose correct control algorithm
System Configuration
Constant gas flow available
Constant gas flow
not available
Tv*<= 500 sec Tv* > 500 sec
Adaptive PI
PI
Soft Pump Soft Pump
* Use the formula below to define the applicable pressure control algorithm.
q
L
gasflow for learn [mbarl/s]
p
SFS
sensor full scale pressure [mbar]
Tv* Vacuum time constant [sec]
CV Chamber Volume [l]
P
SFS
•
CV
Tv =
q
L
Upstream
Process
chamber
Control
valve
Pump
Downstream
Process
chamber
Control
valve
Pump