6 Operating in CI Mode
The CI Flow Control Module
138 7000/7010 Series TQ GC/MS Operating Manual
When a CI system is installed along with a JetClean system, the MFC is shared
by both systems. By design, its use is restricted to one of these systems at a
time. In this case, the Gas B supply is dedicated to hydrogen used for source
cleaning. For detailed information on the JetClean system refer to the JetClean
Operating manual installed on your PC along with this manual.
The Open and Closed states are shown in the monitors as Opened and Closed.
Table 12 CI system MFC state
Result
Gas A flow
Gas B flow
Purge
with Gas A
Purge
with Gas B
Pump out
flow module
Standby, vented,
or EI mode
Gas A Open Closed Open Closed Closed Closed
Gas B Closed Open Closed Open Closed Closed
MFC On
setpoint On setpoint On 100% On 100% On 100% Off 0%
Shutoff valve Open Open Open Open Open Closed
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