Azbil Micro Flow MQV9005 - Page 18

1-8
Chapter 1. INTRODUCTION
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MQV9200/9500/0002/0005/0020/0050
Basic
model
No.
Standard
control
flowrate
range
Display
Material of
gascontacting
parts
Connection
method
Gas
type
Optional
functions
Appended
No.
Description
1 2 3 4 5
MQV Digital mass flow controller, MQV
9200 2 to 200 mL/min (standard)
*1, *4
9500 0.004 to 0.500 L/min (standard)
*1, *4
0002 0.02 to 2.00 L/min (standard)
*1, *4
0005 0.04 to 5.00 L/min (standard)
*1, *4
0020 0.2 to 20.0 L/min (standard)
*1, *4
0050 0.4 to 50.0 L/min (standard)
*1, *4
B Integrated display (body length 90 mm)
C Separate display (body length 90 mm)
S SUS316
R Rc 1/4"
S 1/4" Swagelok
V 1/4" VCR
U 9/16-18UNF
N Air, nitrogen
*2, *4
S Oxygen
*3, *4
0 Without optional functions
0 Without optional functions
1 Model with RS-485 communications
(CPL) function
0 Without optional functions
0 Without optional functions
1 Gas-contacting parts treated to be oil
free
*5
0 Without optional functions
D With inspection certificate
Y With traceability certificate
0 Product version
*1. L/min (standard) and mL/min (standard) indicate the volumetric flow rate per minute (L/min and mL/min) converted
to conditions of 20 ˚C and 101.325 kPa (1 atm). The reference temperature can be changed to 0, 25, or 35 ˚C.
*2. Air/nitrogen is the factory setting. By changing the setting, this model can be used for argon, carbon dioxide (CO
2
),
city gas 13A (LNG: 46 MJ/m
3
), city gas 13A (LNG: 45 MJ/m
3
), propane 100 %, methane 100 %, or butane 100 %.
Additionally, semi-standard gas models that can be used for ammonia or acetylene (seal material: EPDM) can also be
manufactured.
*3. Oxygen is the factory setting. By changing the setting, this model can be used for air/nitrogen, argon, carbon dioxide
(CO
2
), city gas 13A, propane 100 %, methane 100 %, or butane 100 %. However, once this device has been used for
gas other than oxygen, never reuse it for oxygen.
*4. The flow rate ranges in the table are for use of this device with air. The controllable flow range may vary depending
on the type of gas.

Gas type and control range (P.7-11).
*5. When oxygen is selected as the gas type, selection “1,” “gas-contacting parts treated to be oil free,” must be selected
for Optional function 4.