Azbil Micro Flow MQV9005 - Gas Type and Control Range

7-2
Chapter 7. SPECIFICATIONS
z
MQV9005/9020
Model No.
Item
MQV9005 MQV9020
Valve type Proportional solenoid valve
Valve operation Normally closed when de-energized (N.C.)
Standard full-scale flow rate
*1
5 mL/min(standard) 20 mL/min(standard)
Gas types *
2
Air/nitrogen (N
2
), oxygen (O
2
), argon (Ar)
Gas must be dry and not contain corrosive components (chlorine, sulfur, acid).
The gas must also be clean, not containing dust or oil mist.
Control Range
2 to 100 % FS (

Gas type and
control range (P.7-11))
1 to 100 % FS (

Gas type and
control range (P.7-11))
Valve output update cycle 5 ms
Response
(at standard differential
pressure)
Within 0.5 s at setting ±2 % FS (typ.)
(Control starts from the fully closed status or the setting is changed
during control.)
Accuracy
(at standard temperature
and differential pressure,
Q: flow rate)
*3
±1 %FS
Repeatability
(Q: flow rate)
±0.5 %
Temperature characteristics
(with air)
0.06 % FS max. per 1°C
Pressure characteristics (with air) 0.2 % FS max. per 100 kPa
Pressure Standard differential pressure 100 kPa (inlet pressure: 100 kPa (gauge), outlet pressure: 0 kPa (gauge))
Required differential pressure
*4
5 kPa 30 kPa
Operating differential
pressure range
*5
300 kPa max.
Allowable inlet pressure
*6
0.5 MPa (gauge)
Pressure resistance 1 MPa (gauge)
Temperature Standard operating temperature +23 °C
Allowable operating
temperature range
–10 to +60 °C
Allowable storage temperature
range
–20 to +70 °C
Humidity Allowable operating humidity
range
10 to 90 % RH (condensation not allowed)
External leaks Helium leak rate Within 1 x 10
-6
Pa·m
3
/s
Flow rate
setup
Setup method (1) Key operation (2) External analog input
(3) Dedicated loader communications
(4) RS-485 communications (3 wire-system)
*7
*8
Setup resolution

Gas type and control range (P.7-11).
External analog input
Input range: 0 to 5 V DC/1 to 5 V DC/0 to 20 mA/4 to 20 mA (switchable)
Input impedance: 1 MΩ±10 % (voltage input), 250 Ω±10 % (current input)