7-15
Chapter 7. SPECIFICATIONS
External dimensions
z
Models with integrated display
MQV9005B/9020B/9200B/9500B/0002B/0005B/0020B/0050B Unit: mm
37
2-9/16-18UNF
2281
18.5
7.3
15.5
18
(141.4)
Rc 1/4" pipe coupling (2)
Pipe coupling made by Swagelok (2)
SS-400-1-6ST
Applicable pipe:
material SUS316
23.523.5
(25.7) (25.7)
(137)
HEX21
HEX9/16
Rc 1/4" connection type
9/16-18UNF connection type
1/4" Swagelok connection type
M4 screw (2) depth 5 min.
130
90
102
(137.8)
(23.9) (23.9)
SS-4-VCR-1-00032SC11
Jack for
loader
OK
SP
PV
L
Digital
Mass Flow
Controller
L/
min
ALM EV1 EV2
RUN ENT DISP
30±0.5 30±0.5
11±0.5
15±0.5