6-3
Chapter 6. MAINTENANCE AND TROUBLESHOOTING
z
Flow rate zero adjustment
If a cause of the flow rate does not becoming zero in spite of an actual zero flow rate
is that the sensor's zero point has deviated, adjust the flow rate zero point as follows:
(1) Press the DISP key to display the instantaneous PV display.
(The PV and L/min lamps light (mL/min in MQV9005/9020/9200).)
(2) Set the operating mode to the fully closed mode, or set the setting flow rate to
zero, and fully close the valve.
(3) Continue pressing the ENT key in this state.
(4) After about 10 seconds,
0.cal
is indicated on the display. After about one
second, release the ENT key.
(5) The display changes to
Off
. (Flow rate zero adjustment is completed.)
Handling Precautions
•
Perform flow rate zero adjustment with the actual flow rate stabilized to
zero after completely replacing the inside of the flow path with the gas to
be controlled.
Note
•
Flow rate zero adjustment can be performed by external contact input by
selecting “flow rate zero adjustment” for
C-
10
to
C-
12
in the function
setup. For details on how to set up functions, Chapter 5, ADVANCED
OPERATION.
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