Azbil Micro Flow MQV9005 - Page 72

7-4
Chapter 7. SPECIFICATIONS
z
MQV9200/9500/0002
Model No.
Item
MQV9200 MQV9500 MQV0002
Valve type Proportional solenoid valve
Valve operation Normally closed when de-energized (N.C.)
Standard full-scale flow rate
*1
200 mL/min(standard) 0.500 L/min(standard) 2.00 L/min(standard)
Gas types
*2
Air/nitrogen (N
2
), oxygen (O
2
), argon (Ar), carbon dioxide (CO
2
), natural
gas 13A (LNG), 100 % methane (CH
4
), 100 % propane (C
3
H
8
), 100 %
butane (C
4
H
10
)
Gas must be dry and not contain corrosive components (chlorine, sulfur,
acid).
The gas must also be clean, not containing dust or oil mist.
Control Range
1 to 100 % FS (

Gas type and control range (P.7-11))
Valve output update cycle 5 ms
Response
(at standard differential
pressure)
Within 0.3 s at setting ±2 % FS (typ.)
(Control starts from the fully closed status or the setting is changed
during control.)
Accuracy
(at standard temperature
and differential pressure,
Q: flow rate)
*3
(1) ±1 %FS (50 %FS < Q ≤ 100 % FS)
(2) ±0.5 % FS (0 % FS ≤ Q ≤ 50 % FS)
Repeatability
(Q: flow rate)
(1) ±0.5 % FS (50 % FS < Q ≤ 100 % FS)
(2) ±0.25 % FS (0 % FS ≤ Q ≤ 50 % FS)
Temperature characteristics
(with air)
0.06 % FS max. per 1°C
Pressure characteristics (with air) 0.2 % FS max. per 100 kPa
Pressure Standard differential pressure 200 kPa (inlet pressure: 200 kPa (gauge), outlet pressure: 0 kPa (gauge))
Required differential pressure
*4
50 kPa 5 kPa 50 kPa
Operating differential
pressure range
*5
300 kPa max.
Allowable inlet pressure
*6
0.5 MPa (gauge)
Pressure resistance 1 MPa (gauge)
Temperature Standard operating temperature +23 °C
Allowable operating
temperature range
–10 to +60 °C
Allowable storage temperature
range
–20 to +70 °C
Humidity Allowable operating humidity
range
10 to 90 % RH (condensation not allowed)
External leaks Helium leak rate
(1/4" VCR connection type)
Within 1 x 10
-6
Pa·m
3
/s
Flow rate
setup
Setup method (1) Key operation (2) External analog input
(3) Dedicated loader communications
(4) RS-485 communications (3 wire-system)
*7
*8
Setup resolution

Gas type and control range (P.7-11)
External analog input Input range: 0 to 5 V DC/1 to 5 V DC/0 to 20 mA/4 to 20 mA (switchable)
Input impedance: 1 MΩ±10 % (voltage input), 250 Ω±10 % (current input)