Multi-DM™ User Manual Section 5 - System Components Overview
BMC Document Number: DOC-0009 Rev. 5.2 Page 10
5.2 Multi-DM Deformable Mirror
The Multi-DM is a microelectromechanical systems (MEMS) device
that is fabricated using polysilicon surface micromachining methods.
The Multi-DM starts with an array of electrodes on the base silicon. Over each electrode
is a flexure element that is attached to a post that is attached to the underside
of a floating flexible mirror surface. Each electrode and flexure element taken together are
known as an actuator.
Mirror surfaces can be either continuous (without any breaks) over the entire actuator
array, or segmented, with an individual segment over each actuator.
A voltage applied to the electrode will attract the flexure element, pulling on the post
and the mirror directly above it, thus changing the height of the mirror surface
above the actuator. Acting in concert, the actuator array can control the mirror surface to
create shapes from flat to complex 3D surfaces.
Figure 2 - Deformable Mirror Cross Sections
The DM silicon device is packaged and wire bonded to a ceramic chip carrier and the chip
carrier is sealed into a windowed enclosure. The sealed chip carrier enclosure is further
integrated into a rugged aluminum enclosure. Four ribbon cables extend from the rear of
this outer enclosure, each terminating in DC-37 male connectors that mate to the Multi
Driver electronics.
For a dimensional drawing of the DM enclosure see Section 10.3,
Multi-DM Mechanical Drawing.
The DM enclosure is easily mounted in most standard 2-inch optical mounts.
A sample mounting configuration is shown in Figure 3 - Multi-DM in Customer-Supplied
Thorlabs KS2 Kinematic Mirror Mount. For a list of compatible optical mounts,
see Section 5.7, Optical Mount (Optional, Customer-Supplied).
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