Boston Multi-DM - Specifications

Multi-DM™ User Manual Section 4 - Introduction
BMC Document Number: DOC-0009 Rev. 5.2 Page 6
4.3 Specifications
4.3.1 Multi Deformable Mirrors
DM Model Number
Multi-1.5 *
Multi-3.5
Multi-3.5L
Multi-5.5
Multi-1.5-
SLM
Multi-3.5-
SLM
Maximum Stroke (µm) 1.5 3.5 3.5 5.5 1.5 3.5
Actuator Pitch (µm) 300 400 450 450 300 400
Full Aperture Dia. (mm) 4.50 6.00 6.75 6.75 4.80 6.40
Active Aperture Dia. (mm)
3.30
4.40
4.95
4.95
3.60
4.80
Recommended Optical
Aperture Dia. (mm)
2.70 3.60 4.05 4.05 3.60 4.80
Inter-Actuator Coupling
15%
13%
13%
22%
0%
0%
Mechanical Response
time for a 100 nm step
10% - 90% deflection
(μs) **
<40 <75 <75 <100 <35 <80
Avg. Step Size (nm)
< 1
< 1
< 1
< 3
< 1
< 1
Mirror Surface Continuous Membrane Surface Segmented Mirror
Surface
Actuator Count
140
Actuator Layout 12 x 12 square without corners
See Section 10.4, Mirror Mapping for Multi Driver DRV00120-03
Actuator Count
Across Aperture
12
Mirror Coating Aluminum, Gold, or Protected Silver
Surface Quality
(when driven flat)
< 30 nm RMS
< 40 nm RMS
Protective Window
(with Anti-Reflective
Coating)
350-700nm, 650-1050nm, 1050-1700nm, 400-1100nm,
or 550-2400nm
Recommended Operating
Temperature (°C)
-10 – 30
Recommended Storage
Temperature (°C)
-10 – 80
Recommended Relative
Humidity (%RH)
< 30
* The Multi-1.5 is not available for new designs. New optical designs should use the Multi-C-1.5.
** High speed X-Driver option available, contact BMC for more information.