Multi-DM™ User Manual Section 10 - Reference Information
BMC Document Number: DOC-0009 Rev. 5.2 Page 45
Glossary (continued)
Deformable Mirror (DM)
A microelectromechanical systems (MEMS) device consisting of a reflective mirror surface
whose position is controlled by an array of miniature electro-mechanical actuators under the
reflective surface.
DM System
A DM and Driver combination.
Driver
A Driver is an electronics module that sends high voltage signals to the actuators on a DM. The
driver is controlled by a PC through a digital interface such as USB or CameraLink and
appropriate PCIe adapter card. Each series of DMs typically has a standard and one or more
high speed Driver options.
Flat Map
A type of Command Map that drives the Deformable Mirror surface to a plane that is parallel to
the silicon wafer base. Flat Maps for a DM are established by Boston Micromachines through
interferometric analysis and are unique and custom to only that DM-Driver combination. Boston
Micromachines typically supplies a Flat Map with each DM at 50% deflection for use in
establishing a mirror surface for optical alignment and calibration. The Flat Map file has a .txt file
name extension and as with all Command Maps is stored in the Program Files\Boston
Micromachines\Shapes folder.
Frame Rate
The number of Frames of data that can be sent in a given time interval, expressed as frames
per second. The Frame Rate is inversely proportional to the Data Latency.
Frame Size
The amount of data required to define all actuators on a DM.
Low Order Curvature
A relatively small deviation from flatness in a low-order Zernike shape.
Mechanical Response Time
The time it takes an actuator to move a given distance, typically measured and specified
as the 10% - 90% deflection time in μseconds for a 100nm step.
Play
To move actuators in sequence, typically by applying a value from the previous actuator.
Poke
To move a single actuator.
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