Multi-DM™ User Manual Section 10 - Reference Information
BMC Document Number: DOC-0009 Rev. 5.2 Page 64
Mechanical Response Time
The final component of total system performance is the time it takes an actuator
to move the desired distance after the application of a voltage change.
This is known as the Mechanical Response Time.
The Mechanical Response Time is determined primarily by the mirror architecture
of the DM. Actuator pitch and stroke length are the major factors that affect mechanical
response time. DMs with larger pitches and longer strokes have larger, more flexible
actuators, and more flexible actuators take longer to respond. The surface type
of the DM (continuous or segmented) also contributes to mechanical response time
to a lesser but measurable degree.
The Mechanical Response Time is quantified as the time it takes an actuator to go from
10% to 90% deflection when making a small (100-150nm) step. BMC DMs have
mechanical response times that range from under 20 microseconds to approximately
100 microseconds, depending on the DM model.
Mechanical response time can be a relatively small part of the total system
performance if strokes or step sizes are small or a relatively large part of the
total system performance if strokes or step sizes are larger.
Application Examples and System Performance Considerations
The nature of the DM application will determine which components of the total system
performance metric are most important.
• Some applications are more concerned with sending commands as quickly
as possible. In these cases the Data Latency and/or the Amplifier Slew Rate
are most important.
• Other applications need to detect a settled wavefront for analysis in the control loop.
In these cases the Mechanical Response Time is most important.
If you require assistance in analyzing your application, please contact Boston
Micromachines.
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