Brewer Science Cee 200X - Lockout;Tagout Procedures and Information; Intended Use of Machine; Installation; Facilities Requirements

10
Flush tubing and valves with an appropriate solvent and drain system
before servicing.
When draining the waste tank, use appropriate containers and
connection methods.
Ensure proper ventilation/exhaust is used at all times.
Always wear the proper personal protective equipment (PPE) for the job,
including safety
glasses, gloves, and other equipment as needed to
protect from mechanical and chemical hazards.
4.3.5 Lockout/Tagout Procedures and Information
Before servicing, turn off the machine and remove the power inlet cord by disconnecting
the plug where it enters the machine.
4.3.6 Intended Use of Machine
The Cee
®
200X spin coater is intended for use in semiconductor or optical materials
applications. It is primarily intended for substrates up to the maximum stated size.
The Cee
®
200X spin coater is not intended for use in food or medical applications or in
hazardous locations.
The Cee
®
200X spin coater is intended for use only by properly trained personnel
wearing the proper PPE. Anyone who is not trained in the proper use of this
equipment and who has not fully read this manual should not operate this
equipment.
The Cee
®
200X spin coater is intended for use in a clean room environment to provide
the proper processing conditions for the substrates. If it is used outside of a clean room
environment, substrate cleanliness may be compromised.
The Cee
®
200X spin coater is not intended for use in a hazardous or explosive
environment.
4.4 Installation
4.4.1 Facilities Requirements
The Cee
®
200X spin coater requires the following utilities for operation:
• Voltage: Single-phase 100-120 VAC at 10 amps
• Vacuum supply: 20 in Hg
• Nitrogen supply: 45-55 psi (auto dispense)
• Exhaust port: 1 in OD
• Drain port: ¾ in OD