Brewer Science Cee 200X - Troubleshooting Chart

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appropriate Lockout/Tagout procedures.
4. Shut off the vacuum supply at the facility’s supply port.
5. Hold the existing spin chuck in one hand and remove the #8 FHCS vented spin
chuck screw in the center of the spin chuck using a
!
3
32
hex wrench.
6. Pull the spin chuck straight up. It should lift directly off the spindle. If the chuck is
stuck, wiggle it slightly to free it.
7. If the spin chuck was stuck, clean any residue that remains on the spindle or the
bore of the spin chuck. Inspect the spindle and check for any damage.
8. Place the new spin chuck on the spindle. Note that the spin chuck has a notch in
which the drive pin on the spindle fits. When placing the spin chuck on the
spindle, align this notch with the drive pin, and push the spin chuck all the way
down so that the pin is in the notch.
9. Replace the vented spin chuck screw, and tighten it using the hex wrench.
Spin the spin chuck by hand to verify that it does not wobble. If it does, loosen the screw
and reposition the spin chuck. Retighten the screw and spin the chuck by hand to verify
that it does not wobble.
6.3 Troubleshooting Chart
The following chart provides alarm messages that may appear on the touch screen and
ways to resolve the indicated problems. The chart also provides other conditions that
may cause problems as well as potential solutions.
Alarm or Indication
Potential Problem
Resolution
System dead, no display on
touch screen
• Blown fuses
• Machine not plugged in/power
not connected
• Replace fuse
• Plug in machine/connect
power
Spin vacuum error
• Vacuum lost during spin
process
• Spindle vacuum seal worn out
• Check utility connections,
• Verify incoming vacuum is
more than 25 in Hg
• Call Customer Support
Lid close error
• Lid not closed fully
• Lid opened during spin
process
• Close lid before spinning
substrate
Process runs without speed
change
• Servo motion error
• Cycle power on machine. If
this error reoccurs, change
speed or acceleration
parameters and try again.
• Call Customer Support
Grinding sound
• Bearings going bad
• Call Customer Support
Vibration
• Loose belt or mechanical
damage
• Call Customer Support
Oscillation
• Loose belt
• Call Customer Support
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