Brewer Science Cee 200X - Spin Process Screen

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5.2 Spin Process Screen

The Spin Process screen is used to run and monitor spin-coating processes using the

Cee

200X tool’s software.

The controls and indicators found on the Spin Process screen are listed below:

1. Recipe Name: The name of the currently loaded recipe.

2. LIVE Update button: Allows the user to update the process that is currently

running. This button is activated only during a running process. More information on

LIVE Update is available in the LIVE Update section, section 5.7. LIVE Update is not

available on all models.

3. Load button: Navigates to the recipe selection screen (section 5.2.1) to select the

process settings.

4. Edit Recipe button: Navigates to the Spin Process editor if a recipe is loaded. If a

recipe is not loaded, it will navigate to the recipe selection screen (section 5.2.1).

5. Lid Closed indicator: Shows the current state of the Lid Closed sensor.

6. Substrate Present indicator: Shows the state of the Spin Chuck Vacuum sensor.

7. Step indicator: Shows the current step of the process.

8. Time indicator: Shows the time remaining on the current process step.

9. Speed indicator: Shows the current speed of the spindle.