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5.2.2 Centering a Substrate
The Cee
®
200X tool has two methods of centering a substrate. The Centering Time
parameter set on the User Spinner Configuration screen determines the method used.
If the Centering Time (4) parameter is set to 0 seconds, pressing the Start Centering
button will start the Spin Chuck spinning. The chuck will continue to spin as long as the
lid is closed; if the lid is opened, the chuck will stop spinning. The lid can be lifted to
adjust centering as many times as needed.
If the Centering Time (4) parameter is set to a non-zero value, pressing the Start
Centering button will start the spin chuck spinning for the Centering Time value,
regardless of the lid position (opened or closed). Once completed, pressing the Center
button will restart the centering process.