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6. Service and Maintenance
6.1 Maintaining the Vacuum Liquid Trap
The Cee
®
200X tool is relatively maintenance free. The only component that requires
regular attention is the vacuum liquid trap. Its purpose is to trap any liquids that go down
the spindle vacuum hole and prevent them from contaminating downstream
components. To avoid getting any liquids down the spindle vacuum hole, do not spray
any cleaners or solvents directly on the center of the spin chuck and do not dispense
materials without a substrate on the spin chuck. However, because materials may
inadvertently travel down the spindle vacuum hole, the trap must be emptied on
occasion. Follow the steps below to empty the vacuum liquid trap:
1. Turn off the machine by pressing the ON/OFF power switch.
2. Disconnect the power by removing the plug from the rear of the machine. Use
appropriate Lockout/Tagout procedures.
3. Shut off the vacuum supply at the facility supply port.
4. Remove the rear sheet metal cover from the machine; remove any dispense
tubes or valves, as needed.
5. Inside the tool, mounted on the large aluminum block, is the vacuum liquid trap. It
is a translucent white canister with a conical lid. Remove the vacuum liquid trap
from the clips that attach it to the block.
6. Unscrew the canister from the lid, taking care not to spill any liquid into the
machine.
7. Dispose of the liquid and any solids that have accumulated in the vacuum liquid
trap. Follow all hazardous waste disposal procedures, as necessary.
8. Clean the canister and the metal wool inside it with an appropriate solvent.
Again, dispose of the solvent by following all necessary hazardous waste
disposal procedures.
9. Screw the canister back onto the lid. The tube protruding down from the lid
should be pushed through the metal wool.
10. Snap the vacuum liquid trap back onto the clips. Ensure that no tubes are kinked.
11. Replace the rear sheet metal cover; in the process, replace any dispense tubes
or valves that were removed.
12. Reconnect the power cord.
13. Turn on the machine by pressing the ON/OFF power switch.
14. The Cee
®
200X tool is now ready to use.
6.2 Spin Chuck Replacement
The Cee
®
200X tool is capable of processing many different sizes of substrates.
Changing spin chucks may be necessary to run different sizes of substrates, depending
on the spin chuck design. Follow the steps below to change a spin chuck:
1. Open the spin bowl lid and leave it open.
2. Turn off the machine by pressing the ON/OFF power switch.
3. Disconnect power by removing the plug from the rear of the machine. Use
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