Brewer Science Cee 200X - Starting a Process; Aborting a Process

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5.2.3 Starting a Process

Once the substrate is on the spin chuck at a desired position, pressing the Start

Process (Process) button will begin the process. For the duration of the process, the lid

must remained closed.

5.2.4 Aborting a Process

After a process has started, pressing the Abort button will abort the process. Aborting a

process sets the substrate in a position that allows the user to safely recover the

substrate.

Start Process