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Brooks MFM
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Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
35
ENHANCEM ENTS
ASTA NDA RD RESPONSE:< 1 SEC (MF50/51) < 3 SEC (MF53) [1].
BFAST RESPONSE (SPECIFY VALUES .... SEC.) [1]
CLINEA R RA MP (SPECIFY VALUES ....%/SEC.) [1]
DFLOW OUTPUT DA MPING (SPECIFY VALUES .... SEC.) [1]
ENHANCEM ENTS
0UNCALIBRA TED
DEDUCT
1STA NDARD CA LIBRATION INCLUDED (SEE OPTION C)
2STORA GE OF MULTIPLE CA L. CURV ES ; ADD PER AVAIL ABLE
CA LIBRATION GAS
9SPECIFY
POWER SUPPLY INPUT
B+ 24 Vdc = (Standard selection)
ZSPECIFY
AREA CLASSIFICATION
1SAFE AREA [2D]
2CERTIFIED FOR USE IN ZONE 2 [2D]
3UL LISTED (NPT ENTRY) (ONLY MF64)
4UL RECOGNIZ ED (PG11 ENTRY) (ONLY MF64)
5WEL DED SENSOR, NO CERT, (NPT ENTRY) (ONLY MF64) [2D]
6WEL DED SENSOR, NO CERT, (PG11 ENTRY) (ONLY MF64) [2D]
9SPECIFY
MF50S / A C 1 H C 1 B A 0 K C 1 B 2 =TYPICAL MODEL NUM BER
NOTES:
1. ENHANCEM ENTS
PLEA SE FILL IN THE REQUESTED SPECIFICATIONS WHEN YOU HAVE DESCRIBED THE ENHA NCEMENTS.
Standard response time of the flow output signal: Model MF50/51 and MF60/60, standard 1 sec. or on request better
than 0.2 sec. Model MF53/63, standard 3 sec. or on request better than 1 sec. Model MF64, 3 sec.
Standard settling time for controllers: Model MF50/51, standard 1 sec. or on request better than 0.2 sec.
Model MF53, standard 3 sec. or on request better than 1 sec. (to within 2%full scale of final value)
2OPTIONS
A) FOR GASES WHICH CLOG AND CONTAMINATE THE MFC EA SILY, AN ANTI-CLOG LAMINA R FLOW EL EMENT
MUST BE ORDERED. FOR FLOW RA NGES UP TO 3460 mln/min. N2, ADD:
B) DIN/ANSI (PN40/150 LBS PRESSURE RA TING) FLANGED CONNECTION FOR THE 1,5" AND 2" MF64S
C) ENHA NCED ACCURA CY SPECIFICATIONS: 0.5% OF RA TE PLUS 0.1%
F.S. (Flow range 50 mln/min to 100 ln/min)
D) NOT FOR UL LISTED OR RECOGNIZ ED MODELS.
Section 6: Modellisting

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