Brooks MFM - Page 39

Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
39
)3m/gk( ytisneDrotcaf ecifirOrotcafsaGalumroFemansaG
983,3946,1344,03O2N edixoirT negortiN
319,2925,1446,0LCON edirolhC lysortiN
469,1952,1257,0O2N edixO suortiN
339,8276,2961,08F4C enatubolcycoroulfotcO
924,1760,1889,02O negyxO
204,2883,1276,02FO ediroulfiD negyxO
831,213,1837,03O enozO
175,4509,1844,0F3OLC ediroulF ly
rolhcreP
16,01819,2837,001F4C enatuboroulfreP
339,8276,2862,08F4C enetuB-2-oroulfreP
Perfluoromethyl-vinylether (PMVE) PMVE 0,296 2,029 5,131
693,8195,2971,08F3C enaporporoulfreP
222,3506,1212,021H5C )enatneP-n( enatneP
63,570,2782,05FH2CenahteoroulfatneP
814,4188,1405,02LCOC enegsohP
715,11,1387,03HP enihpsohP
Phosphorous PentafluoridePF5 0,346 2,109 5,62
609,377,1594,03FPedidiroulfirT suorohpsohP
Propane
(same as CH3CH2CH3)C3H80,343 1,2742,008
578,1432,1104,06H3C*)eneporP( enelyporP
14,31972,332,06FeRediroulfaxeH muinehR
44,170,1526,04HiS enaliS
975,7264,213,04LCiS edirolhcarteT nociliS
846,4139,1593,04FiS ediroulfarteT nociliS
858,2925,1827,02OS edixoiD rufluS
615,6843,272,06FS ediroulfaxeH rufluS
677,4759,1353,04FS ediroulfarteT rufluS
575,3196,1535,03OSedixoirT rufluS
846,413
9,1324,02F2OS ediroulF lyrufluS
858,6543,2443,04LCC enahtemorolhcarteT
625,4509,1163,04F2C)EFT( enelyhteoroulfarteT
426,4629,1763,04F2N enizardyhoroulfarteT
Trichlorofluoromethane (f-11) CCL3F 0,374 2,244 6,281
830,6102,2923,03LCHiS enalisorolhcirT
Trim ethyloxyborane (TMB)B(OCH3)3 0,31,929 4,638
1,1,2-Trichloro-1,1,2-Triflouroet (f-113) C2CL3F30,231 2,52 7,92
936,2764,1613,0N3)3HC( enimalyhtemirT
82,31462,3722,06FWediroulfaxeH netsgnuT
7,51845,322,06FU ediroulfaxe
H muinarU
277,4589,1425,0rB3H2C edimorB lyniV
887,2294,1245,0LC3H2C edirolhC lyniV
640,2182,1675,0F3H2C ediroulF lyniV
408,0208,0168,0O2H ropaV retaW
158,581,2383,1eX noneX
Gas Conversion Table (continued)
Appendix A