STP-L301/L451 Series Instruction Manual
11-12
Troubleshooting
11.3.5 Overhaul
The recommended maintenance intervals for different process applications are tabulated
below:
Process Period Remarks
Metal etch Process
Deposition)
1 year Processes resulting in large amount of deposits in
the pump will require more frequent service.
Other Etch
Processes
2 years Processes resulting in accumulation of deposits in
the pump will require more frequent service.
Etching
*1
It is recommended to change the pump rotor after 5 years due to accumulated wear of
the protective plating material
Other semiconductor
process
2 years Processes resulting in accumulation of deposits in
the pump will require more frequent service.
Clean applications
(Only vacuum pumping)
5 years
Other use (2 years) Dependent on application, contact Edwards.
The costs of replacing parts that need to be replaced because of deterioration or abrasion will
be at your own charge.
When overhaul of the STP pump or the STP control unit is needed, contact Service office.
◇ The environment affects the life of the air cooling fan of the STP control unit.
Therefore, a failure of the air cooling fan may occur in the period in the table above.
When the air cooling fan has the failure, contact Service office.
◇ Long term use may cause the unbalance of the rotor. Rubber of structure for reduce
vibration level may be deteriorated depending on the environment.
To maintain low vibration, readjust the balance and replace rubber at the overhaul.
*1
“Etching” includes semiconductor etching and LCD etching.
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