Edwards STP-L301 Series

STP-L301/L451 Series Instruction Manual
5
INTRODUCTION
Thank you very much for purchasing Edwards’ turbomolecular pump.
The turbomolecular pump is designed to be installed in the vacuum equipment to exhaust
gases from it.
This manual covers all items necessary to ensure safe installation, operation and
maintenance of the following series of the STP-L301/STP-L451 turbomolecular pump:
Model Name Specification
• STP-L301 Low-vibration type, High-vacuum type
• STP-L451 Low-vibration type, High-vacuum type
• STP-L301C Low-vibration type, High-vacuum type, chemical specific
*1
• STP-L451C Low-vibration type, High-vacuum type, chemical specific
*1
For the specifications of other models, contact Edwards.
In this manual, the above STP pump series is collectively called the "STP pump".
APPLIED STANDARDS
The STP pump conforms to the following directives and standards:
◇ Applied Directives
• EC Machinery Directive
• EC Electromagnetic Compatibility Directive
• EC Low Voltage Directive
◇ Applied Standards
• EN292-1
• EN292-2
• EN60204-1
• EN61326 (class A)
• EN61000-6-2
◇ Applied Standards (Only a some model)
*2
• UL3101-1, 1993 (Electrical Equipment for Laboratory Use; Part 1 : General
Requirements)
*1
: Chemical specific: STP pump with anti-corrosive treatment (responding to chlorine, fluorine or other system gases)
*2
: Contact Edwards about recognized model