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General| TOC | <5 ppb |
|---|---|
| Bacteria | <0.1 CFU/ml |
| Endotoxins | <0.001 EU/ml |
| Particle Size | 0.2 μm |
| Resistivity | 18.2 MΩ·cm |
| Particles >0.2 μm | <1 per ml |
| Flow Rate | 60/120 l/h |
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