calibration (for example, Gas Purity Concentration for curve 4 automatically uses calibration range 4).
Damping is applied only to the active variable.
5.3 Purge and purge-cycle the SGM device
Purging the SGM device prepares it for calibration by ensuring that the reference chamber is filled and sealed
with appropriate process gas to the desired pressure.
Prerequisites
• You must be able to flow process gas through the device.
• You must know the working pressure of your system and the desired reference chamber pressure.
Configuration and Use Manual Purging and calibration
MMI-20020954 March 2021
Configuration and Use Manual 31
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