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What is the F20 used for?
The Filmetrics F20 is used to measure the thickness and optical constants (n and k) of dielectric and
semiconductor thin films. Measured films must be optically smooth and within the thickness range
set by the system configuration requirements specified in Performance Specifications. Commonly
measured films include semiconductor process films such as oxides, nitrides, resists, and poly-
silicon, optical coatings such as hardness and anti-reflection coatings, flat panel display films such
as polyimides, resist, and cell gaps, and the various coatings used in CD and DVD manufacture.
Warning: Accurate measurements require suitable recipe settings and a valid baseline. Improper system setup or
an aged lamp may also lead to errors. It is the user’s responsibility to ensure that this instrument is being used
properly for its intended purpose. Please contact Filmetrics support for assistance with any questions.
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