Film Stack
The Film Stack tab is used to define the film structure, as well as the starting guesses and con-
straints for thickness, n and k. This is also where you determine your analysis method, Grid, FFT ,
or None, as well as any Non-Uniformity that may be present in the sample. Additional options for
Composition, Thickness and Non-Uniformity can be selected or hidden by using the + and - but-
tons.
Setting Up a Film Stack
When measuring a layer, the specifications (d, n, k, and roughness) of the known films (including
the incident medium and substrate) must be entered into the proper fields in the Edit Recipe dialog
box, as well as initial guesses for the values to be measured. The refractive index (n) and extinction
coefficient (k) values for common materials can be selected automatically with the pull-down
menus on the left-hand side of the Edit Recipe dialog box, or by clicking on the box and using the
Search function.
If a material is being measured which is not present in the material library there are three possible
approaches:
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