Example of a reduced wavelength range for measuring thickness of non-ideal films.
Measuring thickness when the approximate thickness is not well known
Unless otherwise specified, FILMeasure will determine a film’s thickness by finding the best
answer within about 1000 Å of the initial (user supplied) value. If the approximate thickness of the
film is not known to better than about 1000 Å, then the Grid method or the Fourier Transform
method of determining approximate thickness may be applied. See Editing Film Structures for
more details.
Measuring photosensitive films
For layers such as unexposed photoresist that cannot be exposed to short-wavelength light, a filter
may be inserted in the slot on the light source
Troubleshooting
Incorrect or unreasonable measurement results can be caused by a number of different factors.
Below are listed some of the more common symptoms of and solutions for poor measurement
results. In all cases it has been assumed that the user has read the Measurement Assumptions sec-
tion, and that each criteria has been met.
To Next Page
Loading...
Need help?
General
