Example #2: Thickness of Films Less Than ½ Micron Thick on Thick
Transparent Substrates: TiO2 on Glass
This example demonstrates the measurement of TiO2 on glass. This type of measurement has a
broad range of other applications, most commonly optical coating and flat-panel display process
films.
Hardware:
If the sample to be measured is flat, the contact sample stage should be used. If the sample is
curved, the hand-held contact probe (e.g., Part# CP-1) may be necessary.
Step 1: Select the film recipe
Select the film structure to be measured, in this case “TiO2 on Glass”, from the Recipe: list box on
the main screen. If the structure to be measured does not exist, a new structure must be defined see
Editing Film Recipes for more details.
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