3
Section 1 Specifications
Specifications are subject to change without notice.
Instrument
Light source Long Life Laser™ diode
Weight 0.82 kg (1.8 lb)
Dimensions (W x D x H) 13.56 cm x 8.93 cm x 12.06 cm (5.34 in. x 3.52 in. x 4.75 in.) (refer to Figure 1)
Enclosure 304 stainless steel
Status indicator
Multi-colored LED for normal status, count alarm, count alert, sensor failure, flow
failure or communication failure
Power requirements 9–28 VDC (source: Class 2 limited energy, < 150 VA)
Power consumption, maximum
Serial and pulse units: 3.3 W; Ethernet unit: 4.3 W; Analog: 3.5 W;
Wireless: 7.1 W. Maximum amperage requirement: 1 A
Operating temperature 10 to 32 °C (50 to 90 °F)
Storage temperature –40 to 70 °C (–40 to 158 °F)
Operating humidity 5 to 95% relative humidity, non-condensing
Storage humidity 5 to 98% relative humidity, non-condensing
VHP Tolerance
The sensor flow path is tolerant to Vaporous Hydrogen Peroxide for VHP-based
standard cleanroom disinfecting and cleaning cycles.
Port sizes
Model 6003: barb fitting for 0.32 cm (
1
/8-inch) ID inlet tubing, 0.64 cm (¼-inch) ID
outlet tubing
Model 6005: barb fitting for 0.32 cm (
1
/8-inch) ID inlet tubing, 0.64 cm (¼-inch) ID
outlet tubing
Model 6015: barb fitting for 0.64 cm (¼-inch) ID inlet tubing, 0.64 cm (¼-inch) ID
outlet tubing
Signal output options
Pulse
Analog 4–20 mA
Serial RS232 with Modbus RTU or FXB communication protocol (no networking)
Serial RS485 with Modbus RTU or FXB communication protocol
Ethernet with ModbusTCP protocol
Data storage 1000 samples/records. Overwrites oldest record when buffer is full.
Sampling
Number of size channels Standard: 2; optional: 4 (exception—pulse units have 2 channels only)
Flow rate
Model 6003: 0.1 cfm (2.83 Lpm) ±10%
Model 6005: 0.1 cfm (2.83 Lpm) ±10%
Model 6015: 1.0 cfm (28.3 Lpm) ±10%
Sensitivity
Model 6003: 0.3 µm at 0.1 cfm (2.83 Lpm)
Model 6005: 0.5 µm at 0.1 cfm (2.83 Lpm)
Model 6015: 0.5 µm at 1.0 cfm (28.3 Lpm)
Range
Model 6003: 0.3 µm to 10.0 µm at 0.1 cfm (2.83 Lpm)
Model 6005: 0.5 µm to 10.0 µm at 0.1 cfm (2.83 Lpm)
Model 6015: 0.5 µm to 10.0 µm at 1.0 cfm (28.3 Lpm)
Flow control Through critical orifice
Inlet pressure Ambient to 2.5 mm (0.1 in) Hg vacuum
Vacuum requirements At least 406 mm (16 in.) Hg (542 mbar)
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