102
Review:
The voltage and the current measurement accuracy of HVSMU in 1mA and 200 V
range used in the application is better than 0.03 %. Therefore, the measured accu-
racy of the resistor can be expected to be better than approximately 0.05% (~ SQRT
(0.03^2 + 0.03^2). Even considering the resistor value drift caused by the self heat-
ing, the overall accuracy can be considered to be better than 0.1 %.
11 12
Extracted 100 kΩ
resistor value
Regression line to extract 100 kΩ value
13
Figure 3-39. 100 kohm CT Classic Test Display.