36
4Specications
No. 99MBE095B
Air supply unit
Main line
Air lter
Compressor
Air device
(1) (2)
(4)
(3)
Scale
No. Component
Appear-
ance
Specications
PartNo.
OrderNo.
(Mitutoyo)
Manufactur-
er Model
(1)
Air lter
y Fluid: Compressed air
y Maximum operating pressure: 1.0
MPa
y Proof pressure: 1.5 MPa
y Maximum particle diameter (ltra-
tion): 5 µm
y Secondary oil concentration:-
-
F1000-8-W
(CKD)
(2) Oil mist lter
y Fluid: Compressed air
y Maximum operating pressure: 1.0
MPa
y Proof pressure: 1.5 MPa
y Maximum particle diameter (ltra-
tion): 0.01 µm
y Secondary oil concentration: 0.01
mg/m
3
or below
y Element replacement: 1 year
(6000 hours) or when pressure is
lowered 0.1 MPa or lower
-
M1000-8-W
(CKD)
(3) Regulator
y Fluid: Compressed air
y Maximum operating pressure: 1.0
MPa
y Proof pressure: 1.5 MPa
y Set pressure range: 0.05 to 0.85
MPa
-
R1000-8-W
(CKD)
(4)
Fixed dia-
phragm
y Fluid: Air
y Set pressure range: 0.1 to 0.9 MPa
y Screw tightening torque: 1.0 to 1.5
N•m
y Flow at 0.1 MPa pressure:
approx. 12.7 L/min
y Flow at 0.2 MPa pressure:
approx. 19 L/min
(per axis)
06ACJ155
PC6-
M5M-0.9
(PISCO, spe-
cial part)