Chapter 4
62 Micro-Ion
®
Module Instruction Manual - 356007-GP
Table 4-1 Troubleshooting Symptoms and Causes (continued)
Symptom Causes Solutions
Pressure reading is inaccurate. • Mechanical damage has occurred.
• Micro-Ion gauge electrode structure
is contaminated by process in the
vacuum chamber.
• Vacuum leak in the chamber.
• Conductron gauge out of
calibration.
• If mechanical damage has occurred,
return the module to the factory (see
Section 4.5 Returning a Micro-Ion
Module for Service on page 66).
• If contamination is present, degas
the Micro-Ion gauge (see page 34) or
remove the gauge and sensor
(see page 66) and bake out to
150 °C (302 °F).
• If the vacuum chamber leaks, check
the vacuum system.
• Calibrate the Micro-Ion Module at
vacuum pressure (see page 36).
Display reads “OFF”. • Gauge button has been pressed, the
Micro-Ion gauge is OFF.
• Connection between pins 1 and 5
on the 15-pin connector is open.
• Turn ON the Micro-Ion gauge (see
page 31).
• Check the circuit and cables (see
Table 2-2 on page 19.
Display reads “0.3–9” when the
Micro-Ion gauge turns ON.
• Micro-Ion gauge collector is coated.
• Electrometer in module is faulty.
• Vacuum chamber pressure is
< 3 x 10
–10
Torr (3.99 x 10
–10
mbar,
3.99 x 10
–8
pascal).
• Perform the Micro-Ion gauge
continuity test (see page 63).
• Replace the gauge assembly (see
Section 4.4 Replacing the Gauge
Assembly on page 66).
• Return the module to the factory (see
Section 4.4 Replacing the Gauge
Assembly on page 66).
Vacuum chamber pressure is < 20
mTorr (2.66 x 10
–2
mbar, 2.66 Pa), but
the pressure display is > 20 mTorr
(2.66 x 10
–2
mbar, 2.66 pascal) and the
Micro-Ion gauge will not turn ON.
• Conductron sensor offset is not set
correctly (out of calibration.
Calibrate the Micro-Ion Module at
vacuum pressure (see page 36).
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