Maintenance
Change chamber lid gasket
72 03.06.2014
¾ Press the new chamber lid gasket into the groove of the chamber
lid.
– The beginning and end of the chamber lid gasket must butt up
against each other without a gap.
¾ During insertion, do not stretch the chamber lid gasket.
¾ Smooth out chamber lid gasket.
¾ Perform a vacuum test, see Section 7.8 "PERFORMING THE VAC-
UUM TEST".
7.8 Performing the vacuum test
¾ Call up the "Service" menu.
¾ Call up the "test" menu.
¾ Select Vacuum test.
¾ Switch on the vacuum test.
¾ Return to the status display.