Olympus AL120-12 Series - Page 31

Operation Manual Outline of Operation Procedure
2-7
Page
6 Setting the Inspection Mode
The following three inspection modes can be chosen.
 All (100%) inspection
 Sampling transfer P1 to P10 (Transfer pattern registration)
 Sampling inspection L1 to L10 (Inspection pattern registration)
(1) All (100%) inspection:
Press the inspection mode button to turn on the [All] LED .
(2) Sampling transfer P1 to P10 (Loading pattern registration):
1) Operation procedure
The loader can only transfer a wafer in the specified slot in
the cassette.
 Press the inspection mode button until the desired pattern
number from P1 to P10 appears on the liquid crystal panel.
(The [Sampling] LED  lights up.)
The number increases incrementally from P1 to P10 each
time the up or down button of the 4-way button is pressed.
The number jumps from P1 to P5 and P5 to L1 as the right
or left button of the 4-way button is pressed.
 The inspection sequence to be used is the one established
before the [Start] button is pressed.
 Ten patterns can be registered in slots P1 to P10.
 Two wafers are transferred at a time. (While one wafer is
under Micro inspection, the next wafer is transferred to the
Macro inspection position.)
2) How to register sampling loading patterns (P1 to P10)
 Press the inspection mode button until the desired pattern
number from P1 to P10 is displayed on the liquid crystal
panel.
 Press the [M3] <Setting> button to display the setting
registration screen.
 Specify the number of the wafer to be selectively transferred
by using the Wafer No. selector button. (The LED in the


Inspection mode button
AL120-LMB12-LP3 P5
Press Start button
No|Size|Thick |Comment
1.|300 |775-500 |
Recall Wafer Setting Memory
Inspection P5
1-10 11-20 20-26
1234567890 1234567890 123456
Wafer 0000000000 0000000000 000000
Exit Setting Memory