Outline of Operation Procedure Operation Manual
5 Setting the Sequence (Inspection Type: [Observation] Button
The [Observation] setting buttons are used to specify an inspection
sequence.
Specify the inspection sequence before initiating inspection. The
selected sequence cannot be changed once inspection is started.
The LEDs in the selected [Observation] setting buttons light up.
The 2nd Back Macro inspection performs the Back Macro inspection
again with the wafer rotated about 20 degrees counterclockwise on
the macro table after the Back Macro inspection is completed. The
2nd Back Macro inspection enables inspection of the areas hidden by
the rear arm during the Back Macro inspection.
The 2nd Back Macro inspection can be selected only when the Back
Macro inspection is selected.
Inspection
To Next Page
Loading...
