Operation Manual Outline of Operation Procedure
The [Wafer No.] buttons are on for the numbers of wafers
whose inspection sequences are already specified.
If you press the [Wafer No.] button for a wafer for which the
inspection sequence is already specified, the LED in the
specified inspection sequence button lights up.
With the LED turned on this way, you can change the
inspection item by pressing the inspection sequence button.
(Each time the inspection sequence button is pressed, the
specified inspection sequence is alternately selected and
deselected.)
* If the [Wafer No.] button for a wafer whose inspection
sequence is already specified is pressed twice, the
inspection sequence setting for this wafer number is
cleared and the LED in the [Wafer No.] button goes off.
After the settings have been completed, press the [M4]:
<Memory> button. As the buzzer sounds, the registration
process is completed.
Press the [M1] <Exit> button to exit the setting registration
screen.
7
Selecting Wafers for Inspection: Wafer No. Selector Button
You can specify the number of the wafer to be inspected in the
sampling mode.
The button is alternately selected and deselected each time it is
pressed. The LED in the selected button lights up.
Before the start of inspection, the LED in the Wafer No. selector
button lights up to indicate that the corresponding wafer is to be
inspected.
During inspection, the LED in the Wafer No. selector button blinks.
At the end of inspection, the LED in the Wafer No. selector button
turns off.
This loader supports 25 wafers.
The button for the 26th wafer will not work even if pressed.
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