Operation Manual Outline of Operation Procedure
11
Setting Wafer Alignment when Unloading a Wafer
When putting an inspected wafer into a cassette, the position of its
orientation flat can be specified.
(1) Displaying the setup screen
1) When you are in the initial menu of the liquid crystal panel,
press the [M3] <Setting> button.
2) When the submenu is displayed, press the [M3] <Setting>
button.
3) The setup screen is displayed.
Move <X> to the setting you are dealing with by manipulating
the up and down buttons of the 4-way button.
Move the cursor to the values of each item to be set by
operating the right and left buttons of the 4-way button, and
change the values with the up and down buttons of the
4-way button.
Centering a wafer when unloading <Centering
unloading>:
Disable or Enable
Performing orientation flat alignment when unloading
<Alignment unloading>:
Disable or Enable
Setting the direction of orientation flat <Direction of
orientation flat>
On the cassette opening side: [Front]
On the opposite side of the cassette opening: [Rear]
On the right side as seen facing the cassette
opening:
[Right]
On the left side as seen facing the cassette opening:
[Left]
AL120-LM12-LP3 ALL
Press Start button
No|Size|Thick |Comment
1.|300 |775-500 |
Recall Wafer Setting Memory
Condition setting
Alignment unloading :Disable
Direction of orientation flat:Disable
Save Cancel
1-10 11-20 20-26
1234567890 1234567890 123456
Wafer 0000000000 0000000000 000000
Exit Setting Memory
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