l
Machine Simulator
The Machine Simulator processing item allows you to see how the alignment marks move on the
image while each axes of the stage or robot is being controlled. You can use it to verify the opera-
tion of the alignment processing items even if the actual stage or robot is not available. The follow-
ing example uses two Cameras to describe the use of the Machine Simulator processing item to
verify the operation of a Vision Master Calibration processing item.
Example: Usage Example for Two Cameras
Camera Image Input processing item
Select Camera 0.
↓
Machine setting processing item
Register Stage data or Robot data depending on the external
device to be used, and then set the information for the exter-
nal device.
The machine settings processing item can be programmed
anywhere other than at the beginning of the flow.
↓
Set Unit Data processing item
Register processing unit data setting processing items for the
number of axes in the selected external device.
For example, if you selected an XYθ stage, there are three
axes. You would register three units in the flow.
• Target unit: The next registered Machine Simulator proc-
essing item
• Data No.: Each axis movement (number 128 to 135)
• Settings data: The next set of axis movements (NMX to
NMR) for the Vision Master Calibration processing item
↓
Machine Simulator processing item
Set the machine setting processing item to reference, and
then set the conditions of the actual coordinates to confirm.
↓
Position measurement processing item
Measure the position of the alignment marks or the position
of a special feature of the workpiece from the image in Cam-
era 0.
Out of the general measurement processing items
(Inspections and Measurements), you can use processing
items with measurement results that have an X and Y in the
calculation strings.
To output the position on the image, set Calibration on the
Output parameter tab page to OFF.
↓
Camera Switching item
Select Camera 1.
↓
Set Unit Data processing item
Register processing unit data setting processing items for the
number of axes in the selected external device.
For example, if you selected an XYθ stage, there are three
axes. You would register three units in the flow.
• Target unit: The next registered Machine Simulator proc-
essing item
• Data No.: Each axis movement (number 128 to 135)
• Settings data: The next set of axis movements (NMX to
NMR) for the Vision Master Calibration processing item
↓
10 Advanced Usage
10 - 66
FH/FHV Series Vision System User’s Manual (Z365-E1)