13
CIDRW System
User’s Manual
SECTION 1
Features
SECTION 1
Product Outline
Features
■ CIDRW Systems that Conform to SEMI Standards (SEMI E99, E5, E4)
List of Applicable Standards
• SEMI E99 THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD
• SEMI E5 EQUIPMENT COMMUNICATION STANDARD 2 MESSAGE CONTENT (SECS II)
• SEMI E4 EQUIPMENT COMMUNICATION STANDARD 1 MESSAGE TRANSFER (SECS I)
SEMI is the acronym for Semiconductor Equipment and Materials International.
SECS is the acronym for SEMI Equipment Communications Standard.
Host
SECS I/II
CIDRW Controller
V700-L22
Amplifier Unit
V640-HAM12
CIDRW Head
V640-HS62
ID Tag
RI-TRP-DR2B/
RI-TRP-WR2B
(Made by Texas
Instruments)
CIDRW System Conforming to SEMI Standards
RS-232C
RS-232C