Oxford Instruments PlasmalabSystem100 - Gas Handling Systems

PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 10 of 24 Printed: 10-Feb-11, 9:07
4. Gas handling
IMPORTANT OIPT gas pods typically weigh >40kg. If you intend fixing your gas pod
to a wall, ensure the wall and gas pod fixings are sturdy enough to bear
at least four times the weight of the gas pod. Periodically, e.g. annually,
check the gas pod and its fixings are secure.
356
426.3
496.6
566.9
637.2
707.5
322.2
0
650
45
SECONDARY GAS OUTLET
LINE TO SYSTEM (ONLY
USED IF A SPLIT MANIFOLD
IS FITTED)
¼"
PRIMARY GAS
OUTLET LINE TO
SYSTEM
HEATER
CONTROLLERS
(IF FITTED)
GAS INLET LINES
(¼"STAINLESS
STEEL TUBE
FOR WELDING TO
THE CUSTOMER'S
SUPPLY)
GAS 1
GAS 2
GAS 3
GAS 4
160
GAS POD COVER
INTERLOCK MICROSWITCH
COMPRESSED
AIR IN (LEFT-HAND
CONNECTOR) & OUT
(4mm push fit)
25-WAY ‘D’ CONNECTOR
FOR PLC/PCB
CONTROL SIGNALS
EARTH
STUD
FIXING HOLE
(6.5 mm DIA.)
LOCATED 20 mm
FROM EDGES
OF BACKPLATE
(ONE AT EACH
CORNER)
220
1030
100
100 mm DIAMETER
EXTRACTION COLLAR
Fig 6: 4-Line gas pod