Oxford Instruments PlasmalabSystem100 - Pump Set Specifications; Process Pump Options Overview

PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 16 of 24 Printed: 10-Feb-11, 9:07
6. Pump set information
CAUTION
Where the rotary vane or Roots pumps are powered from a mains supply separate
from the PlasmalabSystem100, a separate 'emergency off' facility must be provided by the
customer.
6.1 Process pump options
6.1.1 Rotary pump purging
The requirements for rotary pump purging depend on the process used. Customers
should consult the pump manufacturer for their recommendations.
For Alcatel 2033 and 2063 rotary pumps, the recommended minimum N
2
purge rate is
2 litres/minute at a pressure of 2bar to 5bar. For highly corrosive or pyrophoric gases,
4 litres/minute is recommended.
6.1.2 Dry pump water cooling
For Alcatel ADP122P and ADS602P dry pumps, the recommended minimum cooling water
flow rate is 1 litre/minute.
Available
pump
options
Length
mm
Width
mm
Height
mm
Pump inlet
connection
*Pump
outlet
connection
Weight
kg
Water
cooling
Power
consumption
kW
Minimum
N
2
purge
rate
Adixen
2033C2
701
213
348
DN 40
DN 40
76
n/a
1.1 (50Hz)
1.3 (60Hz)
2 lpm
Adixen
2063C2
819
264
397
DN 40
DN 40
98
n/a
2.2 (50Hz)
2.6 (60Hz)
2 lpm
Adixen
ADP122P
830
390
580
DN 50
DN 40
245
1 lpm
1.3 (50Hz)
1.5 (60Hz)
10 lpm
Adixen
ADS602P
830
390
875
DN 100
DN 40
378
1 lpm
1.8 (50Hz)
2.0 (60Hz)
10 lpm
Adixen
RSV301 +
2033C2
1120
400
1090
DN 63
DN 40
220
n/a
2.8
(50/60Hz)
**2 lpm
Adixen
RSV601 +
2063C2
1120
400
1090
DN 100
DN 40
260
n/a
4.5
(50/60Hz)
**2 lpm
* All fittings and pipework connected to the rotary pump exhaust must be made from industry standard
stainless steel. Refer to the OIPT Services Specifications document, sub-section 6.1.
** This figure applies only to the rotary vane pump; the roots blower does not require N
2
purging.