Oxford Instruments PlasmalabSystem100 - System Services Requirements; Electrical Supply Specifications; Water Cooling Specifications; Top Electrode Temperature Control

PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 14 of 24 Printed: 10-Feb-11, 9:07
5. Services
The required services are listed in the following sub-sections. For full details of services
specifications including connection diagrams, electrical connection schematic etc., read in
conjunction with the Oxford Instruments Plasma Technology ‘Services Specifications for
Plasmalab and Ionfab Systems’ document.
5.1 Electrical Supply requirement
Function
Connection
Parameter
Specification
System electrical
supply (208V
system)
Cable (4 meters
long)
Voltage
208Vac ±10%
Current
32 A
Frequency
50 / 60 Hz
Phases
3 phase, N + E
System electrical
supply (415V
system)
Cable (4 meters
long)
Voltage
380Vac –10% to
415Vac +6%
Current
32 A
Frequency
50 / 60 Hz
Phases
3 phase, N + E
5.2 Water Cooling requirement
Function
Connection
Parameter
Specification
Base Pressure
Turbo (if fitted)
1
/4” stainless steel
Swagelok
Flow
1 lpm (0.27 gpm (US))
Temperature
15 - 25°C (59 - 77°F)
LF Generator
(if required)
3
/8” stainless steel
Swagelok
Flow
2 lpm (0.53 gpm (US))
Temperature
10 - 25°C (50 - 77°F)
AMU
3
/8” stainless steel
Swagelok
Flow
1 lpm (0.27 gpm (US))
Temperature
10 - 25°C (50 - 77°F)
Load lock turbo (if
required)
1
/4” stainless steel
Swagelok
Flow
1 lpm (0.27 gpm (US))
Temperature
15 - 25°C (59 - 77°F)
5.3 Top Electrode Temperature requirement
Function
Connection
Parameter
Specification
Liquid controlled
top electrode
3
/8” stainless steel
Swagelok to heater
/ chiller unit
Flow
2 lpm (0.53 gpm (US))
Temperature
As required by process
5.4 Compressed Air requirement
Function
Connection
Parameter
Specification
System CDA
4mm push-fit
Legris
Flow
5 lpm (0.2 cfm)
(combined with gas
pod)
Pressure
4.0 – 6.0 Bar (60 – 90
psi)
Gas pod CDA
4mm push-fit
Legris
Flow
5 lpm (0.2 cfm)
(combined with
system)
Pressure
4.0 – 6.0 Bar (60 – 90
psi)