Oxford Instruments PlasmalabSystem100 - Fig 3: PECVD Layout (2-Frame Cluster Upgradeable)

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 7 of 24 Issue 10: February 11
1795
446
550
1412
514
244
865
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 3: PECVD Layout (2-frame cluster upgradeable)
NOTE: For services panel details, see Fig 4.