PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 4 of 24 Printed: 10-Feb-11, 9:07
2. Installation information
2.1 Dimensions
System dimensions are given in Fig 1, Fig 2 and Fig 3. Gas handling component
dimensions are given in Fig 6, Fig 7 and Fig 8. Teos pod and TEOS oven dimensions are
given in Fig 9 and Fig 10 respectively. Pump dimensions are given in Section 6.
Heater/chiller dimensions are given in Section 7.
2.2 Weights
Typical weights of system components:
2-frame system: 290 kg
3-frame system: 360 kg
6-line Gas pod: 35 kg
TEOS pod: 35 kg
TEOS oven: 30 kg
12-line Gas pod: 65 kg
Pumps: See Section 6 (Pump set information).
Heater/chillers: See Section 7 (Heater/chiller information).
2.3 Heat load
The typical heat load for the clean room installation is:
Operating: 2 kW
Passive: 1.5 kW
Note that these specifications do not include externally sited components, e.g. pumps,
heater/chillers, transformers, etc..
Heat loads for typical chillers are given in the following table. The heat loads are quoted
for a bath temperature of 20°C and 100% cooling.
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