Oxford Instruments PlasmalabSystem100 - Fig 9: TEOS Pod; Fig 10: TEOS Oven

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 13 of 24 Issue 10: February 11
MAINS CABLE
TO MAIN UNIT
(3 METRES LONG)
600
60
60
600
200
100
25
NOTES:
MAXIMUM DISTANCE OF TEOS
POD FROM MAIN UNIT IS
2 METRES
ALL GAS LINES ARE 1/4“
STAINLESS STEEL TUBE,
PROTRUDING 160 mm
FROM POD FOR WELDING
EXTRACTION
COLLAR
510
4545
75
9mm Diameter
for M8 screws
Location of fixing holes
To PECVD system
Argon from
process gas pod
To TEOS
pot
From TEOS pot
6mm push-fit connector
for compressed air (CDA)
This line is heated and
should be 2 metres long
(max.) Pipe heaters and
insulation are supplied.
This line is heated and
should be 1.3 metres long
(max.) Pipe heaters and
insulation are supplied.
1)
2)
Fig 9: TEOS pod
460
490
526
FRONT VIEW LEFT-HAND SIDE VIEW
Fig 10: TEOS oven