Oxford Instruments PlasmalabSystem100 - Default Chapter; Table of Contents

PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 2 of 24 Printed: 10-Feb-11, 9:07
Contents
Page
1. Introduction ............................................................................................................ 3
2. Installation information ........................................................................................... 4
2.1 Dimensions ........................................................................................................ 4
2.2 Weights .............................................................................................................. 4
2.3 Heat load ........................................................................................................... 4
3. Services connections ............................................................................................... 8
4. Gas handling ........................................................................................................ 10
5. Services ................................................................................................................ 14
5.1 Electrical Supply requirement ........................................................................... 14
5.2 Water Cooling requirement ............................................................................... 14
5.3 Top Electrode Temperature requirement .......................................................... 14
5.4 Compressed Air requirement ............................................................................ 14
5.5 Nitrogen requirement ....................................................................................... 15
5.6 Process gas requirement .................................................................................. 15
5.7 Extraction requirement ..................................................................................... 15
6. Pump set information ........................................................................................... 16
7. Heater/chiller information ..................................................................................... 18
8. PLC interlock chain ............................................................................................... 20
8.1 General description .......................................................................................... 20
8.2 Gas box interlocks ........................................................................................... 22
8.2.1 Incompatible gases .................................................................................... 22
8.2.2 System Link Configuration Table ................................................................ 23
8.2.3 System LED Monitoring Table ..................................................................... 24
9. OIPT locations worldwide ...................................................................................... 24
Fig 1: PECVD system layout (3-frame Base pressure turbo configuraton) ..................... 5
Fig 2: PECVD system layout (2-frame) ......................................................................... 6
Fig 3: PECVD Layout (2-frame cluster upgradeable) ..................................................... 7
Fig 4: PECVD services panel ......................................................................................... 8
Fig 5: Electrical connections ........................................................................................ 9
Fig 6: 4-Line gas pod ................................................................................................ 10
Fig 7: 8-Line gas pod ................................................................................................ 11
Fig 8: 12-line gas pod ............................................................................................... 12
Fig 9: TEOS pod ........................................................................................................ 13
Fig 10: TEOS oven ..................................................................................................... 13
Fig 11: Gas box interlock chain ................................................................................. 22
Table 1: RF enable interlock chain details .................................................................. 21
Table 2: Incompatible gases ...................................................................................... 22
Table 3: System link configuration............................................................................. 23
Table 4: System LED monitoring ................................................................................ 24