Oxford Instruments PlasmalabSystem100 - Fig 1: PECVD System Layout (3-Frame Base Pressure Turbo Configuraton)

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 5 of 24 Issue 10: February 11
1412
1630
747
550
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 1: PECVD system layout (3-frame Base pressure turbo configuraton)
NOTE: For services panel details, see Fig 4.